Sistema de fabricación de nano-estructuras basado en MEMS.
| dc.contributor.advisor | Pastoriza, Hernán (director) | |
| dc.contributor.author | Corro, Pablo G. del | |
| dc.date.accessioned | 2026-04-06T16:45:27Z | |
| dc.date.created | 2017-03-01 | |
| dc.description.institutionalaffiliation | Fil. Corro, Pablo G. del. Comisión Nacional de Energía Atómica. Instituto Balseiro; Argentina | |
| dc.format.extent | 108 | |
| dc.identifier.uri | https://nuclea.cnea.gob.ar/handle/20.500.12553/9356 | |
| dc.language.ISO639-3 | spa | |
| dc.publisher | Comisión Nacional de Energía Atómica. Instituto Balseiro | |
| dc.rights.accesslevel | info:eu-repo/semantics/openAccess | |
| dc.rights.uri | https://creativecommons.org/licenses/by-nc-sa/4.0/ | |
| dc.subject.keyword | Micro-electromechanical systems | |
| dc.subject.keyword | Sistemas micro-electromecánicos | |
| dc.subject.keyword | Comb drives | |
| dc.subject.keyword | Nano-fabrication | |
| dc.subject.keyword | Nano-fabricación | |
| dc.subject.keyword | Capacitive sensing | |
| dc.subject.keyword | Sensado capacitivo | |
| dc.subject.keyword | Dynamics stencil | |
| dc.subject.keyword | Estencil dinámico | |
| dc.subject.keyword | Thermal evaporation | |
| dc.subject.keyword | Evaporación térmica | |
| dc.title | Sistema de fabricación de nano-estructuras basado en MEMS. | |
| dc.title.alternative | MEMS-based nano-structures fabrication system. | |
| dc.type | Tesis | |
| dc.type.openaire | info:eu-repo/semantics/bachelorThesis | |
| dc.type.snrd | info:ar-repo/semantics/tesis de grado | |
| dc.type.version | info:eu-repo/semantics/publishedVersion | |
| thesis.degree.grantor | Universidad Nacional de Cuyo (Argentina). Instituto Balseiro |